Pixelated Filter Array for On-Chip Polarized Spectral Detection
نویسندگان
چکیده
On-chip multi-dimensional detection systems integrating pixelated polarization and spectral filter arrays are the latest trend in optical instruments, showing broad application potential for diagnostic medical imaging remote sensing. However, thin-film or microstructure-based typically have a trade-off between dimension, efficiency, resolution. Here, we demonstrate novel on-chip integrated consisting of metasurfaces multilayer films. The with two nanopillars one supercell designed to modulate Jones matrix selection. angle diffraction Fabry–Perot (FP) cavities determine spectrum’s center wavelength. placed on top CMOS sensor; each array corresponds pixel, resulting high resolution efficiency selected state. To verify methodology, nine-channel polarized wavelength range 1350 nm 1550 transverse electric (TE) linear polarization. has 10 balanced average peak transmission over 75%, which is maintained by utilizing lossless dielectric material. proposed can be fabricated using overlay e-beam lithography, process CMOS-compatible. enables broader applications situ resolution, as well vivo systems.
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ژورنال
عنوان ژورنال: Nanomaterials
سال: 2023
ISSN: ['2079-4991']
DOI: https://doi.org/10.3390/nano13192624